Substrate size ≤ 150mm
Substrate size ≤ 200 mm
Substrate size ≤ 300mm
Substrate size ≥ 450mm
Spin Process Stations

Manual Coating

Manual Dispense Spin Coater

The single substrate spin coaters are perfectly suitable for a wide range of applications, including drying rinsing cleaning, and coating. All of our spin coaters are also available in indeck version. Standard unit come with 3 I/O ports, and allows for connection to a dispenser for automatic fluid dispense of up to 3 lines. (The POLOS Advanced models offers unlimited possibilities.) Click here to learn more about our integrator indeck versions.

Up to 150mm

  SPIN150i-NPP
  SPIN150i-integrator In-Deck Model
  HIGH RES 360

Up to 200mm

  SPIN200i-NPP
  SPIN200i-integrator In-Deck Model
  HIGH RES 360

Up to 300mm
  POLOS 300 Advanced in NPP or PTFE.

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