Yes, our spin coaters come standard with a detachable control panel (LAN connection) to easily fit in a standard glove box, and can be used in an argon environment. We offer in-deck units to use in your existing wet bench. All POLOS and SPIN150i spin coaters are cleanroom compatible.
Available with USB-foot pedal: : Pedal 1: Lid unlock, Pedal 2: Start/Stop, Pedal 3: Vacuum on/off.
A glovebox provides a versatile working space isolated from the outside (room) atmosphere, designed to shield operators from danger, and enable repeatable spin coating in a high purity inert atmosphere.
The SPIN150i Spin Processor has been specifically designed for R&D purposes and is ideal for processing small fragments and wafers up to 150mm in a clean, particle-free environment. The chamber can be supplied in either Natural Polypro (NPP) or PTFE for greater chemical compatibility. The versatile platform with 3 programmable I/O ports is ideal for applications including photoresist spin coating, etch, develop or cleaning processes, or, when used in a glove box with proper filtered exhaust, processes with aggressive chemicals.
The detachable keyboard, connected using a standard CAT5 ethernet cable, makes it easy to install the SPIN150i into the glovebox. The small footprint and height of only 250mm (9.84”) allows the unit to fit through a standard air-lock.
The keyboard can be installed, either inside or outside the glove box. The large icons on the touchscreen panel and chemical resistant keyboard are glove-friendly. Alternatively the unit can be operated by optional foot switch.
For OEM-installations we also offer in-deck spin coaters, which are designed for full integration* into the glove box.
Jacomex glove box with a spin coater SPIN150i integration and the Vigor glove box with a spin coater SPIN150i table top.