Substrate size ≤ 150mm
Substrate size ≤ 200 mm
Substrate size ≤ 300mm
Substrate size ≥ 450mm
Spin Process Stations
 
THE SPIN150i SPIN COATER

Our high - quality, all NPP POLOS single wafer spin coaters are specifically designed for R&D and low volume production in the MEMS, Semiconductor, PV, Microfluidics field, etc. Suitable for all typical spin processes: cleaning, rinse/dry, coating, developing and etching.

The low-cost SPIN150i spin coater is suitable for processing fragments as small as 5 mm up to Ø150 (or 6”) or 4" x 4" substrates. Detachable touchpanel. Unlimited Program Storage for recipes with multiple steps each (CW & CCW rotation for puddle spin coating applications.)

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SPIN COATERS SPIN150i-NPP Table Top / SPIN150i-PTFE Table Top
Table Top Model for manual or optionally automated chemical dispense. High quality seamless NPP fabrication. Optional in PTFE. Includes a FREE vacuum chuck and fragment adapter
SPIN COATERS SPIN150i NPP Integrator / SPIN150i PTFE Integrator
Easy in-deck integration in your existing or new wetbench. Available in natural polypropylene (NPP) or optional PTFE process chamber. Includes a FREE vacuum chuck and fragment adapter

Details



 
PRODUCT CONFIGURATOR

TableTop


Integrator



NPP
PTFE

Please choose if syringe holder for center dispensing or static barrier plate is required.

Single Syringe holder


Closed cap with Nitrogen diffuser


Center Injection Line


Triple Syringe holder


Static Barrier Plate



Please specify the dispense system if required.

None


SHSK


Performus


Opus


Peristaltic Pump <75ml


Peristaltic Pump <700ml



Choose your first topside injector type.

None


Spray


Jet


EBR



Choose your second topside injector type.

None
Spray (info)
Jet (info)
EBR (info)

Please indicate if an automated chemical delivery system is required.

None


Dispense vessel


Peristaltic pump



Please indicate if a second automated chemical delivery system is required

None
Dispense vessel (info)
Peristaltic pump

Please indicate preferred drain option.

1 MNPT drain port



Please specify the required drain tube length.

None
1.5 meter (info)
5 meter (info)
1.5 meter PFA (info)

Please indicate if a drain canister is required for waste storage.

None
5 liter (info)

Own Vacuum
Vacuum Pump (oil-less)

Liner Set (info)
Centering Aid (info)
Fragment Adapter
Non-Vacuum Chuck
Foot Switch

Round (wafer)
Square substrate

1" (25mm)
2" (50mm)
3" (75mm)
4" (100mm)
5" (125mm)
6" (150mm)
Other size (please specify you size in the remark field at the end of the configurator)

0 to 4500 EURO
4500 EURO and above

Quoteform

Please fill in the quoteform to send your request.







Remark:


Summary

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