Spin Coating Developing
Spin processor requirements:
- POLOS® SPINx Advanced model with automatic chemical dispense
- Teflon® (PTFE) housing for chemical resistance
- Exhaust/drain combination
- Dispense vessel
Optional Features:
A full range of vacuum and non-vacuum chucks is available to match your substrate size, ensuring easy and accurate centering. Additional options include:
- Centering tool
- Backside rinse
- Edge bead removal
- Additional injector lines
- Auto lid-lock system
Recommended models:
Always verify the chemical compatibility of your process with NPP or PTFE bowl materials
