Fully integrated cabinet with double spin chambers for safe and clean coating & developing process

Compact integrated solution in single cabinet:

• Full-Plastic enclosure with 20 mm thick wall in Natural Polypropylene (NPP)
• Closed chamber with Transparent Lid for easy process control
• DI-water and Nitrogen spray guns located in handy position to facilitate cleaning of the chamber
• Safe liquid sensor(s) for leakage and choked drain detection
• Exhaust presence monitoring system

Coater equipped with:

• Fully automated dosing pump
• Dynamic movable dispense arm with constant or Rpm related speed control for maximum uniformity among whole substrate surface
• Front and back side adjustable Edge Bead Removal
• Nitrogen dry optionally available through lid or movable arm
• Digitally controlled brushless motor with highly accurate speed control and acceleration selectable per recipe step

Developer equipped with:

• Fully automated top spray developing system with double contained lines
• HD drive suitable for chemical saver “puddle” developing
• Developer dispensed through dispense vessel
• Substrate Front & Back Side In Situ Di Water Rinse with manually adjustable flow rate
• Combined chamber rinse and purge system for safe access to process chamber
• Selectable drain line with integrated drain canister for waste collecting