CLEANING
High Pressure and Megasonic Cleaning
Spin processor for spin cleaning and drying
- Full-Plastic enclosure in Natural Polypropylene (NPP)
- Linear movable arm for direct spray among all substrate surface with both High Pressure and Megasonic jets.
- Integrated High Presure Scrubber Jet up to 200 Bar
- Interchangeable high pressure spray tips feature feathered spray pattern edges to deliver a uniform coverage
- Equipped with Megasonic cleaner spot shower with adjustable flow and power output
- Hot DI-Water rinsing system with 3.5kW PFA coated Bath Heating System suitable for high-purity fluids.
- Substrate Front & Back Side In Situ Di Water Rinse
- Integrated CO2 bubbler
- Nitrogen dry through dome or movable arm
- For substrates up to Ø 300 mm
- Closed chamber with Transparent Lid for easy process control
- Easy programmable step-by-step storable recipes, each settable with:
- Hi-pressure pump activation
- Megasonic activation and adjustable output intensity level per step
- Hot DIW rinse activation (Temperature settable per recipe)
- Time 1-999 sec/step
- Speed 1-10.000 rpm
- Acceleration / Deceleration 1-30.000 rpm/sec
