The POLOS® UC330 tabletop ultrasonic spray coating system is designed for high-precision applications in research and small-scale production. From photoresist coatings on various wafer materials to functional thin-film layers, the UC330 delivers consistent, high-quality results on a wide range of substrates.

Exceptional efficiency, reduced waste

Using patented ultrasonic atomization, the UC330 achieves over 95% material usage efficiency. This dramatically reduces photoresist consumption and cuts process costs compared to traditional coating methods. It’s the ideal solution for labs seeking both performance and resource savings.

Flexible. customizable. User-friendly.

Designed with feedback from real-world users, the UC330 combines compact design with intuitive software control. A broad selection of interchangeable ultrasonic nozzles and complementary options ensures full adaptability to your specific process requirements.

Fully integrated & ready to perform

The system comes standard with a syringe pump, carrier gas regulation, ultrasonic generator, and a programmable motion system. Together, these components enable ultra-uniform, fine spray coatings, even on 3D or topographically complex surfaces.