The POLOS® UC320 is a compact tabletop ultrasonic spray coating system designed for high-precision thin-film and photoresist applications in research labs and low-volume production environments. Whether you’re working with various wafer materials or applying functional layers in thin-film processes, the UC320 offers superior control and coating consistency.
Maximized efficiency, minimal waste
Engineered for exceptional material efficiency, the UC320 achieves over 95% photoresist utilization. This significantly reduces consumption and operating costs compared to conventional application methods. It makes this tool a smart choice for labs looking to improve sustainability and process economics without compromising performance.
Tailored to your process needs
With a selection of interchangeable ultrasonic nozzles and a wide range of configuration options, the UC320 can be easily adapted to meet your specific process requirements. A compact footprint and intuitive software controls make operation simple and efficient, ideal for teams needing precision without complexity.
All-in-one, ready to run
The system comes fully equipped with an integrated syringe pump, carrier gas regulation, ultrasonic generator, and a controllable motion platform. Its patented ultrasonic spray technology delivers fine, uniform coatings even on structured or irregular surfaces, ensuring repeatability and high-quality results across a variety of substrates.
