The POLOS® PC320 is a compact, table-top spray coating system engineered for high-uniformity photoresist application on substrates with complex topographies, including MEMS, wafers, masks, and other structured surfaces. Leveraging advanced ultrasonic spray technology, the PC320 ensures consistent, even coatings while dramatically reducing photoresist waste.
Superior efficiency, maximum material utilization
Compared to conventional coating methods, the POLOS® PC320 offers a material usage efficiency of over 95%. This translates into significantly lower photoresist consumption and reduced process costs, without compromising on coating performance. Ideal for labs seeking to scale precision while optimizing resources.
Engineered for precision and flexibility
The system supports highly controlled nano-particle deposition, giving users outstanding repeatability and coverage uniformity. A selection of interchangeable ultrasonic nozzles and optional add-ons allows full customization to meet the specific demands of your process.
User-friendly, compact design
Developed with customer feedback in mind, the PC320 features intuitive software controls in a space-saving format. Despite its small footprint, the system includes all essential components as standard: an integrated syringe pump, carrier gas regulation, ultrasonic generator, and a programmable motion system.
Patented ultrasonic spray technology
At the core of the POLOS® PC320 is our patented ultrasonic atomization system, which delivers fine mist coatings with precision, consistency, and control, even on non-flat or micro-structured surfaces.
Key features
- Bench-top system
- Better coverage of microstructure and controllable coating area than spin coating
- High precision nanoparticle coating due to Ultrasonic Nozzle, material consumption ratio > 95%
- Compatible with all series of POLOS® by Siansonic® nozzles; spray width from 1 mm to 100 mm and flow rate of 0.001 ml/min - 50 ml/min
- Max. spray area: 150 mm x 150 mm (6")
- Uniformity: >95%
- Liquid viscosity: <30 cps
- Thickness of coating: 1 - 100 micron (depending on material)
- XYZ servo motion system
- Precision syringe pump
- Exhaust system
- Laser light for positioning of nozzle
