Features
Features
- • Affordable Spin Coater
- • Spin processor for cleaning, drying, coating, developing and/or etching of up to Ø 260 mm substrates
- • Full-Plastic System in Natural Polypropylene (NPP)
- • Table-Top Model for manual or automated (optional) chemical dispense
- • Transparent Lid with syringe holder for central dispensing
- • Electro-magnetic safety lid lock
- • Detachable controller interface for easy integration
- • N2 diffuser for N2 purge during process.
- • Easy, step- by- step recipe programming via large colour touchscreen.
- • Unlimited Program Storage for recipes with multiple steps / each for:
- • Time 0.1-99999 sec/step
- • Speed 0-12,000 rpm **
- • Rotation direction (CW, CCW, puddling)
- • Acceleration /Deceleration 1-30,000 rpm/sec.**,selectable per step
- • Vacuum On /Off
- • 3 Programmable Dry Contacts: e.g. for automated control of Dispense unit, Nitrogen diffuser, etc.
- • Structured and password protected recipe storage for easy and safe management
- • Digitally controlled Motor with digital incremental speed signal feed back
- • Includes: (1) standard Vacuum Chuck
- • A-V36-S45-PP, Ø45 mm for up to Ø 6“ wafers D-V10-S50-PP, Small Fragment Adapter for Ø ½“- Ø 2’’ Pieces and Fragments (Alternative Chucks optionally available)
- • Drain connection 1” male NPT
- • (Exhaust Hose optional)
** Measured without substrate, limitations may apply depending on chuck used and substrate specification.
