Uniform spin coating up to 12,000 rpm
Uniform spin coating up to 12,000 rpm
Spin etch – develop – clean - coat
Spin etch – develop – clean - coat
Megasonic cleaning on spin coater
Megasonic cleaning on spin coater
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World Wide Support
2 year warranty
Custom System Configuration
Specifications  
Available number of programs Unlimited *
Steps per program Unlimited *
Spin speed* 1 - 12,000 rpm ** ± 1rpm steps
Spin speed accuracy ± 0.1 rpm **
Spin rotational direction Clockwise, Counter clockwise, Puddle
Max. acceleration 30,000 rpm/sec **
Spin time Unlimited*, ± 0.1 seconds steps
Free programmable outputs 3 dry relays, nominal switching capacity 0.5A /125 VAC - 0.3A / 60DC
System data  
Housing material Natural Polypropylene (NPP) ***
Process chamber material Natural Polypropylene (NPP) ***
Interface Detachable, full-size touchscreen, glove-friendly,IP52, chemical resistant
External connection 1 USB Port in the controller
Max. substrate diameter 160mm round or 4ʺ x 4ʺ square
Max. process chamber diameter 202 mm
Dimension (desktop version) 274 (w) x 250 (h) x 451 (d) mm
Shipping weight 14 kgs
Shipping dimension 600 x 380 x 360 mm
Requirements  
Voltage 100 - 120 VAC / 200 - 240 VAC 50/60 Hz (auto select)
Power consumption Max. 500 W
Max. current 5A / 2.5A
Vacuum - 65 kPa (-19 inchHg), ≥ 80 lpm Tube OD Ø8mm
Motor purge gas 20 - 50 kPa, 2-5 l/min, Tube OD Ø 6mm
Drain connection 1” M-NPT


* Considering additional capability of standard unit such as USB backup, recipe cycling, PC software etc.
** Measured without substrate, limitations may apply depending on chuck used and substrate specification.
*** For our spin processors and chucks we use NPP-H with α-crystalline properties.

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