Specifications
| Specifications | |
| Available number of programs | Unlimited * |
| Steps per program | Unlimited * |
| Spin speed* | 1 - 12,000 rpm ** ± 1rpm steps |
| Spin speed accuracy | ± 0.1 rpm ** |
| Spin rotational direction | Clockwise, Counter clockwise, Puddle |
| Max. acceleration | 30,000 rpm/sec ** |
| Spin time | Unlimited*, ± 0.1 seconds steps |
| Free programmable outputs | 3 dry relays, nominal switching capacity 0.5A /125 VAC - 0.3A / 60DC |
| System data | |
| Housing material | Natural Polypropylene (NPP) *** |
| Process chamber material | Natural Polypropylene (NPP) *** |
| Interface | Detachable, full-size touchscreen, glove-friendly,IP52, chemical resistant |
| External connection | 1 USB Port in the controller |
| Max. substrate diameter | 160mm round or 4ʺ x 4ʺ square |
| Max. process chamber diameter | 202 mm |
| Dimension (desktop version) | 274 (w) x 250 (h) x 451 (d) mm |
| Shipping weight | 14 kgs |
| Shipping dimension | 600 x 380 x 360 mm |
| Requirements | |
| Voltage | 100 - 120 VAC / 200 - 240 VAC 50/60 Hz (auto select) |
| Power consumption | Max. 500 W |
| Max. current | 5A / 2.5A |
| Vacuum | - 65 kPa (-19 inchHg), ≥ 80 lpm Tube OD Ø8mm |
| Motor purge gas | 20 - 50 kPa, 2-5 l/min, Tube OD Ø 6mm |
| Drain connection | 1” M-NPT |
* Considering additional capability of standard unit such as USB backup, recipe cycling, PC software etc.
** Measured without substrate, limitations may apply depending on chuck used and substrate specification.
*** For our spin processors and chucks we use NPP-H with α-crystalline properties.
