Connecting the motor purge to a clean dry air, or compressed air (CDA) source ensures no vapors can enter the motor housing. Isolating the spin motor from the fumes of the process environment increases tool life-time.
POLOS spin coaters and spin processors are specially build in Germany for SPS-Europe. Our spinners meet the highest quality standards for the Semiconductor, Biotechnology, and Nanotechnology industries. Go to SPS-Europe.