Connecting the motor purge to a clean dry air, or compressed air (CDA) source ensures no vapors can enter the motor housing. Isolating the spin motor from the fumes of the process environment increases tool life-time.
SPS Europe B.V.
+31 341 360 590
SPS America Inc.
+1 503 502-5722
SPS Asia Technology Pte Ltd.
+65 911 30 172
POLOS® provides high-end spin coating equipment for the Semiconductor, Life Science, laboratories and pharmaceutical industries. Our products are especially targeted to support Universities, R&D institutes and small production facilities. Our portfolio consists of user-friendly and highly durable systems, specially build in Germany. Our spinners meet the highest quality standards. POLOS was established in 2003, with the start of our first product line; the Single Wafer Spin Coating System. As of today, over 4.000 units of these systems have been sold worldwide. Over the years, we have been fortunate to introduce many other new POLOS products. We carefully develop our equipment, based on long-term experience and user feedback, to support your process.
Find our complete portfolio of Photolithography products, including mask aligners, UV direct laser writers, ALD systems and more at our POLOS® website: www.sps-polos.com
