Cleaning
High Pressure and Megasonic Cleaning
Spin processor for spin cleaning and drying
- Full-Plastic enclosure in Natural Polypropylene (NPP)
- Linear movable arm for direct spray among all substrate surface with both High Pressure and Megasonic jets.
- Integrated High Presure Scrubber Jet up to 200 Bar
- Interchangeable high pressure spray tips feature feathered spray pattern edges to deliver a uniform coverage
- Equipped with Megasonic cleaner spot shower with adjustable flow and power output
- Hot DI-Water rinsing system with 3.5kW PFA coated Bath Heating System suitable for high-purity fluids.
- Substrate Front & Back Side In Situ Di Water Rinse
- Integrated CO2 bubbler
- Nitrogen dry through dome or movable arm
- For substrate up to Ø 300 mm
- Closed chamber with Transparent Lid for easy process control
- Easy programmable step-by-step storable recipes, each settable with:
- Hi-pressure pump activation
- Megasonic activation and adjustable output intensity level per step
- Hot DIW rinse activation (Temperature settable per recipe)
- Time 1-999 sec/step
- Speed 1-10.000 rpm
- Acceleration / Deceleration 1-30.000 rpm/sec
| Specifications | |
| Available number of programs | 50 |
| Steps per program | 100 |
| Spin speed* | 1 - 10,000 rpm** ± 1rpm steps |
| Spin speed accuracy | ± 0.1 rpm ** |
| Spin rotational direction | Clockwise, Counter clockwise |
| Max. acceleration | 30,000 rpm/sec |
| Acceleration accuray | ± 0.1 rpm/sec |
| Spin speed read out accuray | ± 0.1 rpm |
| System data | |
| Interface | Keyboard and LCD full size display, chemical resistant, IP50 |
| Tank model | 2x NPP process tank, 10 L effective volume |
| Utilities | DIW spray gun, N2 spray gun, vacuum wand, front light indicators |
| Chamber diameter | 402 mm |
| Dimension (desktop version) | 1400 (w) x 1600 (h) x 950 (d) mm |
| Safety | Leak sensor, drain sensor, ShutDown supply valve |
