Uniform spin coating up to 12,000 rpm
Uniform spin coating up to 12,000 rpm
Spin etch – develop – clean - coat
Spin etch – develop – clean - coat
Megasonic cleaning on spin coater
Megasonic cleaning on spin coater
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World Wide Support
2 year warranty
Custom System Configuration

High Pressure and Megasonic Cleaning

Spin processor for spin cleaning and drying

  • Full-Plastic enclosure in Natural Polypropylene (NPP)
  • Linear movable arm for direct spray among all substrate surface with both High Pressure and Megasonic jets.
  • Integrated High Presure Scrubber Jet up to 200 Bar
  • Interchangeable high pressure spray tips feature feathered spray pattern edges to deliver a uniform coverage
  • Equipped with Megasonic cleaner spot shower with adjustable flow and power output
  • Hot DI-Water rinsing system with 3.5kW PFA coated Bath Heating System suitable for high-purity fluids.
  • Substrate Front & Back Side In Situ Di Water Rinse
  • Integrated CO2 bubbler
  • Nitrogen dry through dome or movable arm
  • For substrate up to Ø 300 mm
  • Closed chamber with Transparent Lid for easy process control
  • Easy programmable step-by-step storable recipes, each settable with:
    • Hi-pressure pump activation
    • Megasonic activation and adjustable output intensity level per step
    • Hot DIW rinse activation (Temperature settable per recipe)
    • Time 1-999 sec/step
    • Speed 1-10.000 rpm
    • Acceleration / Deceleration 1-30.000 rpm/sec
Specifications  
Available number of programs 50
Steps per program 100
Spin speed* 1 - 10,000 rpm** ± 1rpm steps
Spin speed accuracy ± 0.1 rpm **
Spin rotational direction Clockwise, Counter clockwise
Max. acceleration 30,000 rpm/sec
Acceleration accuray ± 0.1 rpm/sec
Spin speed read out accuray ± 0.1 rpm
System data  
Interface Keyboard and LCD full size display, chemical resistant, IP50
Tank model 2x NPP process tank, 10 L effective volume
Utilities DIW spray gun, N2 spray gun, vacuum wand, front light indicators
Chamber diameter 402 mm
Dimension (desktop version) 1400 (w) x 1600 (h) x 950 (d) mm
Safety Leak sensor, drain sensor, ShutDown supply valve

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