Uniform spin coating up to 12,000 rpm
Uniform spin coating up to 12,000 rpm
Spin etch – develop – clean - coat
Spin etch – develop – clean - coat
Megasonic cleaning on spin coater
Megasonic cleaning on spin coater
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World Wide Support
2 year warranty
Custom System Configuration

Warranty

WARRANTY TERMS

POLOS and SPIN150 Wafer Spin Processor

The POLOS Single Wafer Spin Processor, including its added-on options, is a high quality product that has been manufactured and tested under the APT Quality Assurance System.  APT is a qualified ISO9000 manufacturer.

APT provides a limited warranty covering systems for malfunctions due to manufacturing defects or faulty materials.  APT Warranty period is 24 months ex works within Europe, or 12 months ex works outside of Europe, commencing on the date of shipment as noted on your original packing note.  Your legal rights are not affected by this warranty.

Limited Warranty Conditions:

  • At manufacturer’s discretion, a faulty system may be repaired or replaced if necessary; to be decided after inspection of the defect cause, at SPS-Europe or distributor's facility.
  • Return of a system for paid or warranty repair requires a prior to shipment MRA (Material Return Authorization), please check with your distributor.
  • System must be returned properly cleaned, packaged, insured and shipped freight pre-paid.  Shipping, transport and/or duty fees are excluded from this warranty.
  • Warranty claims can only be honored within the warranty period and after inspection at SPS-Europe or distributor’s facility.
  • System defects as a result of return transport damage, due to incorrect packaging are not covered by the manufacturer’s warranty.

Warranty Exclusions:

  • Parts and consumables subject to normal operation and process wear and tear.
  • Defects caused by use of chemicals not suited for materials of the spin processor’s construction.
  • System defects caused by:
    • Use of other than APT original parts.
    • Negligence of system operation instructions.
    • Abnormal environmental conditions.
    • Overload conditions.
    • Incorrect service, installation or maintenance.
    • Unauthorized repairs or system modifications.

System warranty will not be extended nor renewed unless explicitly agreed upon in writing by the manufacturer or distributor.

In the case of any system defects and other questions, please contact your local distributor and specify: 
System Type, System S/N, Purchase Order Number and Date of Purchase.

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