Substrate size ≤ 150mm
Substrate size ≤ 200 mm
Substrate size ≤ 300mm
Substrate size ≥ 450mm
Spin Process Stations

Spin Coater Developing

SPIN COATER REQUIREMENTS:
  Spin coater POLOS Advanced with Automatic Chemical Dispense
  Teflon® (PTFE) Housing
  Exhaust / Drain Combination
  Dispense Vessel

SPIN COATER OPTIONS:

A full range of substrate size matching vacuum or non-vacuum chucks is available, for easy centering.
  Centering Tool
  Backside Rinse
  Edge Bead Removal
  Additional Injector Lines
  Auto Lid-Lock

SPIN COATER RECOMMENDED MODELS:
Up to 150mm:
  SPIN COATER SPIN150i in PTFE or POLOS 150 Advanced PTFE 

Up to 200mm:
  SPIN COATER SPIN200i in PTFE or POLOS 200 Advanced PTFE

Up to 300mm:
  SPIN COATER POLOS 300 Advanced PTFE

 

CHECK CHEMICAL COMPATIBILITY OF YOUR PROCESS WITH THE NPP OR PTFE BOWL-MATERIAL.

Example Megasonic Enhanced Photoresist Strip with DiO3

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