Spin Coater Developing
Spin Coater Developing
SPIN COATER REQUIREMENTS:
√ Spin coater POLOS Advanced with Automatic Chemical Dispense
√ Teflon® (PTFE) Housing
√ Exhaust / Drain Combination
√ Dispense Vessel
SPIN COATER OPTIONS:
A full range of substrate size matching vacuum or non-vacuum chucks is available, for easy centering.
√ Centering Tool
√ Backside Rinse
√ Edge Bead Removal
√ Additional Injector Lines
√ Auto Lid-Lock
SPIN COATER RECOMMENDED MODELS:
Up to 150mm:
√ SPIN COATER SPIN150i in PTFE or POLOS 150 Advanced PTFE
Up to 200mm:
√ SPIN COATER SPIN200i in PTFE or POLOS 200 Advanced PTFE
Up to 300mm:
√ SPIN COATER POLOS 300 Advanced PTFE
CHECK CHEMICAL COMPATIBILITY OF YOUR PROCESS WITH THE NPP OR PTFE BOWL-MATERIAL.
