Configure your preferred 200mm spincoater. Or call us

TableTop


Integrator



NPP
PTFE

Please choose if syringe holder for center dispensing or static barrier plate is required.

Closed Cap with N2 Diffuser


Syringe Holder


Center Injection Line


Triple Syringe


Static Barrier Plate



Please specify the dispense system if required.

None


SHSK


Performus


Opus


Peristaltic <75ml


Peristaltic <775ml



Choose your first topside injector type.

None


Spray


Jet


EBR Topside


MegPie



Choose your second topside injector type.

None
Spray (info)
Jet (info)
EBR (info)

Please indicate if an automated chemical delivery system is required.

None


Dispense vessel


Peristaltic pump



Please indicate if a second automated chemical delivery system is required

None
Dispense vessel (info)
Peristaltic pump

Please indicate preferred drain option.

1 MNPT drain port



Please specify the required drain tube length.

None
1.5 meter (info)
5 meter (info)
1.5 meter PFA (info)

Please indicate if a drain canister is required for waste storage.

None
5 liter (info)

Own Vacuum
Vacuum Pump (oil-less) (info)

Liner Set
Centering Aid
Non-Vacuum Chuck

Round (wafer)
Square substrates
Other (please specify in remark field at the end of the configurator)

6" (150mm)
8" (200mm)
10" (250mm)
12" (300mm)
18" (450mm)
Other (please specify in remark field at the end of the configurator)

0 to 6500 EURO
6500 to 10.000 EURO
10.000 EURO and above

Quoteform

Please fill in the quoteform to send your request.







Remark:


Summary

Single Substrate Spin Processor:

The SPIN200i single substrate spin processor is perfectly suitable for a wide range of applications, including drying, rinsing, cleaning, and coating.

This table-top spin processor is seamless build in a full-plastic, housing in natural polypropylene (NPP) or optional PTFE, and is suitable for processing fragments as small as 5mm up to substrates sizes up to Ø260mm (or 8”) or 6"x6".

Available models & materials:

  1. SPIN200i-NPP Table-Top Model NPP***
  2. SPIN200i-PTFE Table-Top Model PTFE***
  3. SPIN200i-NPP Integrator in NPP***
  4. SPIN200i-PTFE Integrator in PTFE***

Specifications:

  • Max. substrate diameter: 260mm
  • Max. process chamber diameter: 302mm
  • Programmable digital process controller:
    • Storage of unlimited* programs of unlimited steps of ± 0.1 seconds minimum each
    • Speed 1-12.000 rpm** ± 1 rpm steps with ± 0.1 rpm accuracy
    • detachable control panel with full size touchscreen,
      glove-friendly and suitable for use in glove-box
    • USB port
  • Spin rotation: clockwise, counter clockwise and puddle
  • Vacuum On/Off
  • 3 free programmable outputs (dry contacts) e.g. for automated control of Dispense unit, Nitrogen diffuser, etc.
  • Dimensions: 380 (w) x 559 (d) x 307 (h) mm (including detachable control panel)

Chucks & Adapters:

  • Vacuum Chuck A-V87-S96-PP for larger substrates up to Ø200mm (includedl)
  • Vacuum Chuck A-V36-S45-PP-HD up to Ø150mm (optional)
  • Fragment Adapter D-V10-S50-PP for fragments (Ø >10mm up to <1”)
    of Semi Standard Wafer, 300-700µm (optional)
  • Small Fragment Adapter D-V2.5-S50-PP for fragments (Ø>3mm up to 15mm) (optional)

Processes:

Drying, Rinsing, Coating, Cleaning

* Considering additional capability of standard unit such as USB backup, recipe cycling, PC software etc.
** Measured without substrate, limitations may apply depending on chuck used and substrate specification.
*** For our NPP spin processors and chucks we use NPP-H with α-crystalline properties. For our PTFE spin processors and chucks we use TFM material, superior for use with chemicals above standard PTFE, with a much higher material surface density than standard PTFE, thus none to significant lower “Memory Capability” for absorbing contamination from Chemicals.

SPIN200i TableTop

New POLOS SPIN200i
New POLOS SPIN200i
chucks.jpg
chucks.jpg

www.spincoating.com is powered by www.sps-europe.com