Spin Process Station

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Fully integrated cabinet with double spin chambers for safe and clean coating & developing process

 

Compact integrated solution in single cabinet:

  • Full-Plastic enclosure with 20mm thick wall in Natural Polypropylene (NPP)
  • Closed chamber with Transparent Lid for easy process control
  • DI-water and Nitrogen spray guns Located in handy position to facilitate cleaning of the chamber
  • Safe liquid sensor(s) for leakage and choked drain detection
  • Exhaust presence monitoring system

Coater equipped with:

  • Fully automated dosing pump
  • Dynamic movable dispense arm with constant or Rpm related speed control for maximum uniformity among whole substrate surface
  • Front and back side adjustable Edge Bead Removal
  • Nitrogen dry optionally available through lid or movable arm
  • Digitally controlled brushless motor with highly accurate speed control and acceleration selectable per recipe step

Developer equipped with:

  • Fully automated top spray developing system with double contained lines
  • HD drive suitable for chemical saver “puddle” developing
  • Developer dispensed through dispense vessel
  • Substrate Front & Back Side In Situ Di Water Rinse with manually adjustable flow rate
  • Combined chamber rinse and purge system for safe access to process chamber
  • Selectable drain line with integrated drain canister for waste collecting

See also our other models:

Cleaning

Etching

 

Spin Process Station

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