Spin Process Station

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CLEANING

High Pressure and Megasonic Cleaning

Spin processor for spin cleaning and drying

 

  • Full-Plastic enclosure in Natural Polypropylene (NPP)
  • Linear movable arm for direct spray among all substrate surface with both High Pressure and Megasonic jets.
  • Integrated High Presure Scrubber Jet up to 200 Bar
  • Interchangeable high pressure spray tips feature feathered spray pattern edges to deliver a uniform coverage
  • Equipped with Megasonic cleaner spot shower with adjustable flow and power output
  • Hot DI-Water rinsing system with 3.5kW PFA coated Bath Heating System suitable for high-purity fluids.
  • Substrate Front & Back Side In Situ Di Water Rinse
  • Integrated CO2 bubbler
  • Nitrogen dry through dome or movable arm
  • For substrate up to Ø 300 mm
  • Closed chamber with Transparent Lid for easy process control
  • Easy programmable step-by-step storable recipes, each settable with:
    • Hi-pressure pump activation
    • Megasonic activation and adjustable output intensity level per step
    • Hot DIW rinse activation (Temperature settable per recipe)
    • Time 1-999 sec/step
    • Speed 1-10.000 rpm
    • Acceleration / Deceleration 1-30.000 rpm/sec

 

See also our other models:

Coating & Developing

Etching

Also Available with MMLO (Megasonic Metal Lift Off). Please click this link for a video

 

Spin Process Station

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