SPS-Europe proudly presents the POLOS Precision Hotplate. The Modular setup of this new Table Top Hotplate enables easy plate (chuck) exchange and upgradeable options, making this a versatile and affordable tool for R&D and Pilot Lines.
The POLOS Hotplate is available for single or double substrates(also available for 200mm wafers). Several heater surface temperature areas are available for dual processing. A precision digital temperature controller enables adjustable temperature steps of 1°C. It is suitable for soft bake as well as hard bake processes and curing of photo resist or epoxy or any other work requiring precise temperature control.