MCD200-PTFE-HD Single Substrate Spin Processor:
- Manual or optional Semi-Automatic Chemical Dispense
- Clear/Transparant Flat Top Lid, with Center Hole
- Seamless Full-Plastic Housing in High Chemical Resistant PTFE (TFM)
- Table-Top Model (optional In-Deck): dimensions: 33cm (w) x 55cm (d) x 31cm (h)
- Substrate size: fragments and substrates up to Ø260mm (8”) or 6"x6"
- Heavy-Duty Servo-Controlled Motor
- Programmable Digital Process Controller:
- Storage of 30 programs of 99 Step Recipes each
- Speed 1-10.000rpm, Time, Acceleration
- Storage of 30 programs of 99 Step Recipes each
- 2 Programmable ON/OFF Switching Outputs
Unit comes including standard Vacuum Chuck A-V36-S45-PTFE-HD and Small Fragment Adapter D-V10-S50-PTFE-HD up to Ø150mm, or alternatively, Vacuum Chuck A-V87-S96-PTFE-HD for larger substrates up to Ø200mm with (1) centering aid (F-Sx/POLOS200).
or
Adapter D-V10-S50-PTFE-HD, A-V87-S96-PTFE-HD
easily fits on top of A-V36-S45-PTFE-HD