Spin Processor Chucks

Spin coater Chucks

Chucks are available in following materials:

  • PP: NPP with EPDM o-ring
  • FP: PTFE (TFM 1600 with FKM o-ring)  alternatively for thin substrates: porous PTFE

Note: other materials available on request, please contact us for details

Round Substrates 
2" up to 300mm wafers
Multi-purpose Vacuum Chuck,
without centering pins.

A - Type

A-V36-S45-PP-HD
Vacuum Chuck Ø45mm (1,75"), up to 6"

A-V87-S96-PP-HD
Vacuum Chuck Ø96mm (3,75"), 8"

Customized sizes at request.

 

Round Substrates
2" up to 300mm wafers
Vacuum Chuck,
with centering pins,
for high speed application
Customized sizes at request.

B & L - Type

 

 

 

     

Round Substrates
2" up to 300mm wafers
Non-Vacuum Chuck,
with centering pins.
For edge contact only.
Customized sizes at request.

C & E - Type

 

 

 

 

Fragments/Die

Vacuum Chuck Adapter,
for small substrate/fragment

D - Type

D-V10-S50-PP
Fragment Adaptor, Vacuum 50mm centerhole
for use with A-V36-S45-PP Vacuum Chuck

D-V2.5-S50-PP
Fragment Adaptor, Vacuum 50mm centerhole
for use with A-V36-S45-PP Vacuum Chuck

 

Customized Chuck

Designed for special application.

N - Type

 

   

Rectangular Substrates
(Laboratory Glass, etc.)
With embedded recess
for precise coating. Vacuum Chuck.
Customized sizes at request.

K - Type

 

Low contact.
Non-vacuum Chuck with
clearance for round and square/ rectangular substrate, and
centering pins.
For back side processing.
Customized sizes at request.

H - Type

 

 

Thin, Fragile Substrates.
Vacuum Chuck
Customized sizes at request. Also porous PTFE chucks are available.

J - Type

Vacuum Chuck for film or other thin substrates.

 

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