Customized vacuum or mechanical chucks are available for almost any application.

Chucks are available in following materials:

  • PP: NPP with EPDM o-ring
  • FP: PTFE (TFM 1600 with FKM o-ring)  alternatively for thin substrates: porous PTFE

Note: other materials available on request, please contact us for details.


Dies, Wafer, Fragments, etc.
Round Substrates

Vacuum for 2" up to 300mm Wafer.
Low Contact
Round Substrates

Vacuum and Centering pins.
Square Substrates

Mask, Solar Cells, etc.
Round Substrates

Mechanical and Centering pins.
Regular Substrates

Labaratory Glass, etc.
Thin, Fragile, Substrates

Foils, etc. is powered by -