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Spin Processing
150 mm spin processors
200 mm spin processors
300 mm spin processors
450 mm spin processors
Options
Chucks
Chuck adapters
Spray Coating
Spray Coaters
Spray Coaters For Medical Fields
Spin Wet Stations
Spin Wet Stations
Hotplates
Hotplates
Spin Processing
150 mm spin processors
(5)
200 mm spin processors
(5)
300 mm spin processors
(6)
450 mm spin processors
(2)
Options
(11)
Chucks
(11)
Chuck adapters
(5)
Spray Coating
Spray Coaters
(5)
Spray Coaters For Medical Fields
(2)
Spin Wet Stations
Spin Wet Stations
(3)
Hotplates
Hotplates
(2)
Options
EBR (Edge Bead Removal)
Auto Dispense Lines
Full PTFE Dispense Vessel Automated injector line
MegPie
The Sapphire MegPie is a single-wafer Megasonic
transducer for cleaning and sonochemical
processing
BSR (Back Side Rinse)
Static Barrier Plate
High Pressure Jet
Corrugated Drainhose and connector
In NPP, including connection to connect to the drainport.
Vacuum Pump
Needle Back side EBR 100