Uniform spin coating up to 12,000 rpm
Uniform spin coating up to 12,000 rpm
Spin etch – develop – clean - coat
Spin etch – develop – clean - coat
Megasonic cleaning on spin coater
Megasonic cleaning on spin coater
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World Wide Support
2 year warranty
Custom System Configuration
EBR (Edge Bead Removal)
 
Auto Dispense Lines

Full PTFE Dispense Vessel Automated injector line
MegPie

The Sapphire MegPie is a single-wafer Megasonic
transducer for cleaning and sonochemical
processing
BSR (Back Side Rinse)
 
Static Barrier Plate
High Pressure Jet
Corrugated Drainhose and connector

In NPP, including connection to connect to the drainport.
Vacuum Pump
Needle Back side EBR 100

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