Uniform spin coating up to 12,000 rpm
Uniform spin coating up to 12,000 rpm
Spin etch – develop – clean - coat
Spin etch – develop – clean - coat
Megasonic cleaning on spin coater
Megasonic cleaning on spin coater
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World Wide Support
2 year warranty
Custom System Configuration

Features

  • •  Automatic Chemical Dispense:
    • •  Dispensing fluids through up to 6 spray nozzles
    • •  Each programmable for sequential or parallel dispense
  • •  Clear/Transparant Domed ECTFE Lid with central integrated N2 shower purge
  • •  Available in:
    • •  Seamless Full-Plastic Housing in Natural Polypropylene (NPP)
    • •  Seamless Full-Plastic Housing in High Chemical Resistant PTFE (TFM)
  • •  Table Top spin coater Model: dimensions: 43cm (w) x 65cm (d) x 31cm (h)
  • •  Substrate wafer size: fragments and substrates up to Ø360mm or 8"x8"
  • •  Heavy-Duty Servo-Controlled Motor:
    • •  Assuring repeatable rpm rates
    • •  Rotation Speed Adjustable 1 to 10.000 rpm
    • •  Clockwise and Counterclockwise Rotation
    • •  Puddle function for developer purposes
  • •  Easy, step by step Programming via Gloved-Finger-Friendly, Full-Size Keyboard with LED Backlit Display
  • •  Programmable Digital Process Controller:
    • •  Storage of multiple programs of 99 Step Recipes each, for:
      • •  Speed 1-10.000rpm, Time, Acceleration
      • •  Vacuum On/Off
      • •  Relay Open/Close
      • •  Multi-User Access Levels
  • •  2 Programmable ON/OFF Switching Outputs
    e.g. for Dispense On/Off, Nitrogen On/Off, etc.
  • •  Drain connection
  • •  CE-approved

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