Uniform spin coating up to 12,000 rpm
Uniform spin coating up to 12,000 rpm
Spin etch – develop – clean - coat
Spin etch – develop – clean - coat
Megasonic cleaning on spin coater
Megasonic cleaning on spin coater
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World Wide Support
2 year warranty
Custom System Configuration

Customized vacuum or mechanical chucks are available for almost any application.

Chucks are available in following materials:

  • PP: NPP with EPDM o-ring
  • FP: PTFE (TFM 1600 with FKM o-ring)  alternatively for thin substrates: porous PTFE

Note: other materials available on request, please contact us for details.

Fragments

Dies, Wafer, Fragments, etc.
Round Substrates

Vacuum for 2" up to 300mm Wafer.
Low Contact
Round Substrates

Vacuum and Centering pins.
Square Substrates

Mask, Solar Cells, etc.
Round Substrates

Mechanical and Centering pins.
Regular Substrates

Labaratory Glass, etc.
Thin, Fragile, Substrates

Foils, etc.

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