Fragments
Dies, Wafer, Fragments, etc.
Chucks
Customized vacuum or mechanical chucks are available for almost any application.
Chucks are available in following materials:
- PP: NPP with EPDM o-ring
- FP: PTFE (TFM 1600 with FKM o-ring) alternatively for thin substrates: porous PTFE
Note: other materials available on request, please contact us for details.
Round Substrates
Vacuum for 2" up to 300mm Wafer.
Vacuum for 2" up to 300mm Wafer.
Low Contact
Round Substrates
Vacuum and Centering pins.
Vacuum and Centering pins.
Square Substrates
Mask, Solar Cells, etc.
Mask, Solar Cells, etc.
Round Substrates
Mechanical and Centering pins.
Mechanical and Centering pins.
Regular Substrates
Labaratory Glass, etc.
Labaratory Glass, etc.
Thin, Fragile, Substrates
Foils, etc.
Foils, etc.
