Options

EBR (Edge Bead Removal)
 
Auto Dispense Lines

Full PTFE Dispense Vessel Automated injector line
MegPie

The Sapphire MegPie is a single-wafer Megasonic
transducer for cleaning and sonochemical
processing
BSR (Back Side Rinse)
 
Static Barrier Plate
High Pressure Jet
Corrugated Drainhose and connector

In NPP, including connection to connect to the drainport.
Vacuum Pump
Needle Back side EBR 100

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