Table Top Model, stand alone version, for substrates up to 450 mm diameter, manual chemical dispense, 2 automatic static dispense lines, pneumatic lid opening and closing, chuckadapter and one vacuumchuck for up to 3 wafersizes, speed max 1500 rpm, chamber max diameter approx 450 mm
TYPICAL APPLICATIONS FOR THE POLOS 450 SPIN COATERS:
Chamber max diameter approx. 450 mm
POLOS spin coaters and spin processors are specially build in Germany for SPS-Europe. Our spinners meet the highest quality standards for the Semiconductor, Biotechnology, and Nanotechnology industries. Go to SPS-Europe.
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