Substrate size ≤ 150mm
Substrate size ≤ 200 mm
Substrate size ≤ 300mm
Substrate size ≥ 450mm
Spin Process Stations

SPIN Coater MODELS:

Select available model spincoater based on your substrate size or required spin application:
You can see all the spincoater are suitable for Cleaning, Rinse/Dry, Coating, Developing & Etching.

SPIN COATER MODELS

SUBSTRATE SIZE

AVAILABLE SPIN COATER MODELS

 MATERIAL 

DRYING

RINSE
CLEANING

ETCHING *

DEVELOP

MANUAL

AUTOMATIC

UP TO Ø 150 mm
(or 6") OR 4”x4”

Spin coater SPIN 150i
Table Top or In-Deck

 

NPP / PTFE    
UP TO Ø 200 mm
(or 8") OR 6”x6”

Spin coater SPIN 200i
Table Top
or In-Deck

NPP / PTFE  

Spin coater POLOS 200 Advanced
Table Top or In-Deck

NPP / PTFE

   
UP TO Ø 300 mm
(or 12") OR 8"x8"

Spin coater POLOS 300 Advanced

NPP / PTFE    

UP TO Ø 450 mm

Spin coater POLOS 450 Advanced

NPP

 


 


 
 
 
 
 

 

Availablewidths:

  • 85 cm
  • 140 cm
  • 170 cm
  • 200 cm

Process Stations **

NPP depends on the integrated spin processor model of your choice  

* Etchant must be competible with NPP. All units are also available in PTFE. Please refer to our chemical compatibility chart.
** Polypropylene enclosure with built-in integrated spin processor depending on your application. Fully automatic for cleaning, high pressure scrub, metal lift-off, stripping, rinsing, spin drying, coating, developing and/or etching of up to Ø 260 mm substrates.

Click here for available chucks for the spincoater.

 

GENERAL FEATURES SPIN COATERS

  • Wide range from Manual up to Fully Automated Chemicals Dispense
  • Vibration-Free Spin speeds up to 12.000rpm
  • Small Footprint Table-Top platform
  • System integrated solutions available on request
  • Seamless Polypropylene Housing Material for high Chemical Resistance and Easy Cleaning of the Spin Coater
  • PTFE spincoater Configurations available for aggressive Chemicals
  • Full Size, detachable Keyboard enabling easy Program Access, even with gloved fingers!
  • Digital Process Controller for accurate, repeatable processing
  • Multiple Programs, with multiple programmable steps allowing high process flexibility
  • Programmable Relays, allowing process controlled interfacing with external hardware
  • German Quality
  • Affordable Spincoater for universities

Teflon® is a Dupont Registered Trademark, TFM is a Dyneon Registered Trademark.

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