Spin Process Stations is an versatile platform that you can used for a wide range of processes. Based on the proven high quality POLOS single substrate spin coater, the modular design Spin process station provides excellent value for money: full plastic construction, with high-end components, compatible with any chemical environment in a modular set-up, suitable for your specific requirement.
The seamless integration of polypropylene (optional PTFE) Spin processor in the base station allows you to work with all kinds of chemicals. In the station housing various modules can be incorporated and centrally controlled for supply of chemicals and gases.
Standard configurations are available for cleaning substrates as well as photomasks, photoresist coating, developing, etching and lift-off processes.
High Pressure and Megasonic Cleaning
Spin processor for spin cleaning and drying
|Available number of programs||50|
|Steps per program||100|
|Spin speed*||1 - 10,000 rpm** ± 1rpm steps|
|Spin speed accuracy||± 0.1 rpm **|
|Spin rotational direction||Clockwise, Counter clockwise|
|Max. acceleration||30,000 rpm/sec|
|Acceleration accuray||± 0.1 rpm/sec|
|Spin speed read out accuray||± 0.1 rpm|
|Interface||Keyboard and LCD full size display, chemical resistant, IP50|
|Tank model||2x NPP process tank, 10 L effective volume|
|Utilities||DIW spray gun, N2 spray gun, vacuum wand, front light indicators|
|Chamber diameter||402 mm|
|Dimension (desktop version)||1400 (w) x 1600 (h) x 950 (d) mm|
|Safety||Leak sensor, drain sensor, ShutDown supply valve|
To protect users, the process chamber is automatically opened and the chuck is raised - presenting the substrate for easier and safer unloading. This eliminates any possible contact between the operator and possibly chemically contaminated surfaces. Both manual and automatic chamber rinse/flush sequences can be programmed, allowing all contaminated surfaces to easily be neutralized - even after a power failure. The automatic chemical supply system and the drain/extract / exhaust are integrated into the system to ensure fail-safe operation. Purged labyrinth seals, monitored safety interlocks, alarm sensors, vacuum monitoring, spin motor overload protection and emergency switch ensure the highest safety standards.
Also available with MMLO (Megasonic Metal Lift Off).