To protect users, the process chamber is automatically opened and the chuck is raised - presenting the substrate for easier and safer unloading. This eliminates any possible contact between the operator and possibly chemically contaminated surfaces. Both manual and automatic chamber rinse/flush sequences can be programmed, allowing all contaminated surfaces to easily be neutralized - even after a power failure. The automatic chemical supply system and the drain/extract / exhaust are integrated into the system to ensure fail-safe operation. Purged labyrinth seals, monitored safety interlocks, alarm sensors, vacuum monitoring, spin motor overload protection and emergency switch ensure the highest safety standards.
POLOS spin coaters and spin processors are specially build in Germany for SPS-Europe. Our spinners meet the highest quality standards for the Semiconductor, Biotechnology, and Nanotechnology industries. Go to SPS-Europe.