MCD300-PTFE-HD Spin Coater
FEATURES MCD300-PTFE-HD Single Substrate Spin Processor:
- Manual or optional Semi-Automatic Chemical Dispense
- Clear/Transparant Flat Top Lid, with Center Hole
- Seamless Full-Plastic Housing in High Chemical Resistant PTFE (TFM)
- Table-Top Model: dimensions: 43cm (w) x 65cm (d) x 31cm (h)
- Substrate size: fragments and substrates up to Ø360mm or 8"x8"
- Heavy-Duty Servo-Controlled Motor:
- Assuring repeatable rpm rates
- Rotation Speed Adjustable 1 to 10.000rpm
- Clockwise and Counterclockwise Rotation
- Puddle function for developer purposes
- Easy, step-by-step Programming via Gloved-Finger-Friendly, Full-Size Keyboard with LED Backlit Display
- Programmable Digital Process Controller:
- Storage of 50 programs of 99 Step Recipes each, for:
- Speed 1-10.000rpm, Time, Acceleration
- Vacuum On/Off
- Relay Open/Close
- Multi-User Access Levels
- Storage of 50 programs of 99 Step Recipes each, for:
- 2 Programmable ON/OFF Switching Outputs
e.g. for Dispense On/Off, Nitrogen On/Off, etc. - Drain connection
- CE-approved
Unit comes including standard Vacuum Chuck A-V87-S96-PTFE-HD and (1) centering aid (F-Sx/POLOS300).
A-V87-S96-PTFE-HD
A wide variety of other chucks, including non-vacuum, are available at request.
OPTIONS
- OEM In-Deck Version (ID)
- Drain Exhauxt Hose (DEXT)
- Vacuum Pump (VP80)
- Wafer Centering Tool (F-Sx/POLOS300)
- N2 Diffuser Syringe Holder, mountable on lid (N2DSH)
- Syringe Kit (SHSK)
- Semi-Automatic Dispense System (DS-PER-V or DS-PER-VI for watery fluids)
TYPICAL APPLICATIONS:
PICTURE:
Teflon® is a Dupont registered trademark. TFM is a Dyneon registered trademark.
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