MCD300-PTFE-HD Spin Coater

  FEATURES MCD300-PTFE-HD Single Substrate Spin Processor:

  • Manual or optional Semi-Automatic Chemical Dispense
  • Clear/Transparant Flat Top Lid, with Center Hole
  • Seamless Full-Plastic Housing in High Chemical Resistant PTFE (TFM)
  • Table-Top Model: dimensions: 43cm (w) x 65cm (d) x 31cm (h)
  • Substrate size: fragments and substrates up to Ø360mm or 8"x8"
  • Heavy-Duty Servo-Controlled Motor:
    • Assuring repeatable rpm rates
    • Rotation Speed Adjustable 1 to 10.000rpm
    • Clockwise and Counterclockwise Rotation
    • Puddle function for developer purposes
  • Easy, step-by-step Programming via Gloved-Finger-Friendly, Full-Size Keyboard with LED Backlit Display 
  • Programmable Digital Process Controller:
    • Storage of 50 programs of 99 Step Recipes each, for:
      • Speed 1-10.000rpm, Time, Acceleration
      • Vacuum On/Off 
      • Relay Open/Close
      • Multi-User Access Levels
  • 2 Programmable ON/OFF Switching Outputs
    e.g. for Dispense On/Off, Nitrogen On/Off, etc.
  • Drain connection
  • CE-approved

Unit comes including standard Vacuum Chuck A-V87-S96-PTFE-HD and (1) centering aid (F-Sx/POLOS300).
A wide variety of other chucks, including non-vacuum, are available at request.


  • OEM In-Deck Version (ID)
  • Drain Exhauxt Hose (DEXT)
  • Vacuum Pump (VP80)
  • Wafer Centering Tool (F-Sx/POLOS300)
  • N2 Diffuser Syringe Holder, mountable on lid (N2DSH)
  • Syringe Kit (SHSK)
  • Semi-Automatic Dispense System (DS-PER-V or DS-PER-VI for watery fluids)




Teflon® is a Dupont registered trademark. TFM is a Dyneon registered trademark.

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