| |
| Available number of programs |
Unlimited * |
| Steps per program |
Unlimited * |
| Spin speed* |
1 - 12,000 rpm ** ± 1rpm steps |
| Spin speed accuracy |
± 0.1 rpm ** |
| Spin rotational direction |
Clockwise, Counter clockwise Puddle |
| Max. acceleration |
30,000 rpm/sec ** |
| Spin time |
Unlimited*, ± 0.1 seconds steps |
| Free programmable outputs |
3 pcs, relays, nominal switching capacity 0.5A /125 VAC - 0.3A / 60DC |
| |
| Housing material |
Natural Polypropylene (NPP) *** |
| Process chamber material |
Natural Polypropylene (NPP) *** |
| Interface |
Detachable, full-size touchscreen, glove-friendly,IP52, chemical resistant |
| External connection |
1 USB Port in the controller |
| Max. substrate diameter |
260mm round or 6ʺ x 6ʺ square |
| Max. process chamber diameter |
302 mm |
| Dimension (desktop version) |
380 (w) x 307 (h) x 599 (d) mm |
| Shipping weight |
20 kgs |
| Shipping dimension |
680 x 580 x 480 mm |
| |
| Voltage |
100 - 120 VAC / 200 - 240 VAC 50/60 Hz (auto select) |
| Power consumption |
Max. 500 W |
| Max. current |
5A / 2,5A |
| Vacuum |
- 65 kPa (-19 inchHg), ≥ 80 lpm Tube OD Ø8mm |
| Motor purge gas |
20 - 50 kPa, 2-5 l/min, Tube OD Ø 6mm |
| Drain connection |
1” M-NPT |
* Considering additional capability of standard unit such as USB backup, recipe cycling, PC software etc.
** Measured without substrate, limitations may apply depending on chuck used and substrate specification.
*** For our spin processors and chucks we use NPP-H with α-crystalline properties.
Details
Features
- • Affordable Spin Coater
- • Spin processor for cleaning, drying, coating, developing and/or etching of up to Ø 260 mm substrates
- • Full-Plastic System in Natural Polypropylene (NPP)
- • Table-Top Model for manual or automated (optional) chemical dispense
- • Transparent Lid with syringe holder for central dispensing
- • Electro-magnetic safety lid lock
- • Detachable controller interface for easy integration
- • N2 diffuser for N2 purge during process.
- • Easy, step- by- step recipe programming via large colour touchscreen.
- • Unlimited Program Storage for recipes with multiple steps / each for:
- • Time 0.1-99999 sec/step
- • Speed 0-12,000 rpm **
- • Rotation direction (CW, CCW, puddling)
- • Acceleration /Deceleration 1-30,000 rpm/sec.**,selectable per step
- • Vacuum On /Off
- • 3 Programmable Dry Contacts: e.g. for automated control of Dispense unit, Nitrogen diffuser, etc.
- • Structured and password protected recipe storage for easy and safe management
- • Digitally controlled Motor with digital incremental speed signal feed back
- • Includes: (1) standard Vacuum Chuck
- • A-V36-S45-PP, Ø45 mm for up to Ø 6“ wafers D-V10-S50-PP, Small Fragment Adapter for Ø ½“- Ø 2’’ Pieces and Fragments (Alternative Chucks optionally available)
- • Drain connection 1” male NPT
- • (Exhaust Hose optional)
** Measured without substrate, limitations may apply depending on chuck used and substrate specification.
Details
Customized vacuum or mechanical chucks are available for almost any application.
Chucks are available in following materials:
- PP: NPP with EPDM o-ring
- FP: PTFE (TFM 1600 with FKM o-ring) alternatively for thin substrates: porous PTFE
Note: other materials available on request, please contact us for details.
Fragments
Dies, Wafer, Fragments, etc.
Round Substrates
Vacuum for 2" up to 300mm Wafer.
Round Substrates
Vacuum and Centering pins.
Square Substrates
Mask, Solar Cells, etc.
Round Substrates
Mechanical and Centering pins.
Regular Substrates
Labaratory Glass, etc.
Thin, Fragile, Substrates
Foils, etc.
Details
