Liner Set
Liners are available in PET (Polyethylenterephthalat). 0.5mm thick, transparent, antistatic (108 - 1010 Ω) to prevent possible build-up of static charge in the chamber.
Options
Syringe Holder Starter Kit
Consisting of several 30cc dispense barrels, needles and plungers.
Consisting of several 30cc dispense barrels, needles and plungers.
Central Dispensing Syringe Holder
For single or triple syringes, with integrated N2 diffuser.
For single or triple syringes, with integrated N2 diffuser.
Performus X Dispense Unit
Can be mounted in syringe holder and be connected to one of the 3 programmable dry contacts.
Can be mounted in syringe holder and be connected to one of the 3 programmable dry contacts.
Foot Switch
For hand free usage; controlling start/stop function and vacuum.
For hand free usage; controlling start/stop function and vacuum.
Centering Tool
Corrugated Drainhose and connector
In NPP, including connection to connect to the drainport.
In NPP, including connection to connect to the drainport.
Vacuum Pump
Applications
The POLOS spin coaters have proven to be an excellent cleaning, rinsing and drying solution after wafer processing.
Rinse / CleaningTraditional batch hydrogen peroxide-based wafer cleaning methods involve immersion in tanks for RCA and SC2 cleaning.
Puddle etching method of thin film by using spin coater. All unit are suitable for Puddle etching processes.
Manual Dispense Spin Coater are perfectly suitable for a wide range of applications, including drying rinsing cleaning, and coating.
Automatic Dispense Spin coater are perfectly suitable for a wide range of applications, including drying, rinsing, cleaning, and coating.
A full range of substrate size matching vacuum or non-vacuum chucks is available, for easy centering.