All spin coaters come standard with a chuck included. NPP material for standard units, PTFE for PTFE units.
The SPIN150i for up to 150mm substrates includes vacuum chuck A-V36 and fragment adaptor D-V10 (for 10mm and up).
The other models come standard with vacuum chuck A-V78.

Customized vacuum or mechanical chucks are available for almost any application.

Chucks are available in following materials:

  • PP: NPP with EPDM o-ring
  • FP: PTFE (TFM 1600 with FKM o-ring)  alternatively for thin substrates: porous PTFE

Note: other materials and custom design spin coater chucks are available on request, please contact us for details.


Round Substrates

Vacuum Chucks (Type A)

Round Substrates

Vacuum with Centering Pins (Type B)

Round Substrates

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