All spin coaters come standard with a chuck included. NPP material for standard units, PTFE for PTFE units.
The SPIN150i for up to 150mm substrates includes vacuum chuck A-V36 and fragment adaptor D-V10 (for 10mm and up).
The other models come standard with vacuum chuck A-V78.
Customized vacuum or mechanical chucks are available for almost any application.
Chucks are available in following materials:
Note: other materials and custom design spin coater chucks are available on request, please contact us for details.
Round SubstratesVacuum Chucks (Type A) |
Round SubstratesVacuum with Centering Pins (Type B) |
Round SubstratesNon-Vacuum with Centering Pins (Type C) |
FragmentsFragment Adapter (Type D) |
Low-Contact - Square & MasksNon-Vacuum for Square Substrates (Type E) |
Low Contact – Round SubstratesNon-Vacuum for Cleaning Drying (Type H) |
Thin, Fragile, Substrates & FoilAdapter with perforated surface (Type J) |
Laboratory Glass, RectangularChuck for Embedded Substrates (Type K) |
POLOS spin coaters and spin processors are specially build in Germany for SPS-Europe. Our spinners meet the highest quality standards for the Semiconductor, Biotechnology, and Nanotechnology industries. Go to SPS-Europe.
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