Uniform spin coating up to 12,000 rpm
Uniform spin coating up to 12,000 rpm
Spin etch – develop – clean - coat
Spin etch – develop – clean - coat
Megasonic cleaning on spin coater
Megasonic cleaning on spin coater
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World Wide Support
2 year warranty
Custom System Configuration

All spin coaters come standard with a chuck included. NPP material for standard units, PTFE for PTFE units.
The SPIN150i for up to 150mm substrates includes vacuum chuck A-V36 and fragment adaptor D-V10 (for 10mm and up).
The other models come standard with vacuum chuck A-V78.

Customized vacuum or mechanical chucks are available for almost any application.

Chucks are available in following materials:

  • PP: NPP with EPDM o-ring
  • FP: PTFE (TFM 1600 with FKM o-ring)  alternatively for thin substrates: porous PTFE

Note: other materials and custom design spin coater chucks are available on request, please contact us for details.

 

Round Substrates

Vacuum Chucks (Type A)

https://www.spincoating.com/bron/cms_image/411-Spin-coater-chuck-round-substrates-spincoating.jpg

Round Substrates

Vacuum with Centering Pins (Type B)

https://www.spincoating.com/bron/cms_image/415-Spin-coater-chuck-round-substrates-mechanical-spincoating.jpg

Round Substrates

Non-Vacuum with Centering Pins (Type C)

https://www.spincoating.com/bron/cms_image/413-Spin-coater-chuck-round-substrates-centering-spincoating.jpg

Fragments

Fragment Adapter (Type D)

https://www.spincoating.com/bron/cms_image/410-Spin-coater-chuck-fragments-spincoating.jpg

Low-Contact - Square & Masks

Non-Vacuum for Square Substrates (Type E)

https://www.spincoating.com/bron/cms_image/414-Spin-coater-chuck-square-substrates-spincoating.jpg

Low Contact – Round Substrates

Non-Vacuum for Cleaning Drying (Type H)

https://www.spincoating.com/bron/cms_image/412-Spin-coater-chuck-low-contact-spincoating.jpg

Thin, Fragile, Substrates & Foil

Adapter with perforated surface (Type J)

https://www.spincoating.com/bron/cms_image/417-Spin-coater-chuck-thin-fragile-substrates-spincoating.jpg

Laboratory Glass, Rectangular

Chuck for Embedded Substrates (Type K)

https://www.spincoating.com/bron/cms_image/thumb_s/s-416-Spin-coater-chuck-regular-substrates-spincoating.jpg

 

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