Chucks

All spin coaters come standard with a chuck included. NPP material for standard units, PTFE for PTFE units.
The SPIN150i for up to 150mm substrates includes vacuum chuck A-V36 and fragment adaptor D-V10 (for 10mm and up).
The other models come standard with vacuum chuck A-V78.

Customized vacuum or mechanical chucks are available for almost any application.

Chucks are available in following materials:

  • PP: NPP with EPDM o-ring
  • FP: PTFE (TFM 1600 with FKM o-ring)  alternatively for thin substrates: porous PTFE

Note: other materials and custom design spin coater chucks are available on request, please contact us for details.

 

Round Substrates

Vacuum Chucks (Type A)

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Round Substrates

Vacuum with Centering Pins (Type B)

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Round Substrates

Non-Vacuum with Centering Pins (Type C)

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