Uniform spin coating up to 12,000 rpm
Uniform spin coating up to 12,000 rpm
Spin etch  develop  clean - coat
Spin etch develop clean - coat
Megasonic cleaning on spin coater
Megasonic cleaning on spin coater
√ World Wide Support
√ 2 year warranty
√ Custom System Configuration

Affordable spin coaters for spin process solutions!

Since 2003, SPS-Europe offer the POLOS™ and SPIN150 series versatile, high-quality, all plastic single substrate spin coaters.
Our spin coater models have proven themselves over the years for spincoating a wide range of substrates: from small fragments up to Ø450 mm. We offer special spin coater or processors for large glass panels (e.g. LCD/LED ) up to 900 mm square!
 
Over 2,000 systems installed at major technical universities, institutes and R&D worldwide.

Select your substrate size

Substrate size
up to Ø 150mm
Substrate size
Ø 200mm
Substrate size
Ø 300mm
Substrate size
Ø 450mm +
Spin Process Stations

Spin processing with the POLOS spin coater?

A spin coater is mostly used for creating thin films with thicknesses below
10 nm of even, high quality thickness, using centripetal force. Typically you spin coat photoresist on a semiconductor wafer, but our spin coaters are also used for spincoating polymer thin films like blockcopolymers (BCP) as PDMS and PMMA, or as a low-cost sol–gel method for spin-coated ZnO films.

 

 

Spincoating in numbers

Substrate size
5 mm to 900 mm
Accuracy
0.1 rpm
Speed
1 – 12,000 rpm
Acceleration
1 – 30,000 rpm

Spin coating process

Each Fab, each R&D or even each student in university employs different spin processes. POLOS spin coater equipment offer unlimited processes: intuitive programming on the touch screen controller, even USB up- or download from your own pc,
if so preferred, with unlimited programs /steps and graphical representation.
 
This makes the POLOS SPIN150i the best laboratory spin coater you can buy!

Getting started with spincoating?

The right spin coater for your spincoating process?

Configure your preferred spincoater.

TableTop


Integrator



NPP
PTFE

Please choose if syringe holder for center dispensing or static barrier plate is required.

Single Syringe holder


Closed cap with Nitrogen diffuser


Center Injection Line


Triple Syringe holder


Static Barrier Plate



Please specify the dispense system if required.

None


SHSK


Performus


Opus


Peristaltic Pump <75ml


Peristaltic Pump <700ml



Choose your first topside injector type.

None


Spray


Jet


EBR



Choose your second topside injector type.

None
Spray (info)
Jet (info)
EBR (info)

Please indicate if module for automatic control of up to 3 injector lines is required.

No


Yes



Please indicate if module for automatic control of up to 3 injector lines is required.

No


Yes



Please indicate if an automated chemical delivery system is required.

None


Dispense vessel



Please indicate if a second automated chemical delivery system is required

None
Dispense vessel (info)

Please indicate preferred drain option.

1 MNPT drain port


Liners



Please specify the required drain tube length.

None
1.5 meter (info)
5 meter (info)
1.5 meter PFA (info)

Please indicate if a drain canister is required for waste storage.

None
5 liter (info)

Quoteform

Please fill in the quoteform to send your request.







Remark:


Summary

www.spincoating.com is powered by www.sps-europe.com