SPIN200i

Spin coaters SPIN200i NPP Table Top / SPIN200i PTFE Table Top

This table-top spin processor is seamless build in a full-plastic, housing in natural polypropylene (NPP) or optional PTFE. Includes a FREE vacuum chuck and fragment adapter

SPIN200i-NPP Integrator / SPIN200i-PTFE Integrator

Suitable for easy integration in your existing or new wetbench. Available in natural polypropylene (NPP) or optional PTFE process chamber. Includes a FREE vacuum chuck and fragment adapter

Details

* Considering additional capability of standard unit such as USB backup, recipe cycling, PC software etc.
** Measured without substrate, limitations may apply depending on chuck used and substrate specification.
*** For our spin processors and chucks we use NPP-H with α-crystalline properties.

Details

Features

• •  Affordable Spin Coater
• •  Spin processor for cleaning, drying, coating, developing and/or etching of up to Ø 260 mm substrates
• •  Full-Plastic System in Natural Polypropylene (NPP)
• •  Table-Top Model for manual or automated (optional) chemical dispense
• •  Transparent Lid with syringe holder for central dispensing
• •  Electro-magnetic safety lid lock
• •  Detachable controller interface for easy integration
• •  N2 diffuser for N2 purge during process.
• •  Easy, step- by- step recipe programming via large colour touchscreen.
• •  Unlimited Program Storage for recipes with multiple steps / each for:
  • •  Time 0.1-99999 sec/step
  • •  Speed 0-12,000 rpm **
  • •  Rotation direction (CW, CCW, puddling)
  • •  Acceleration /Deceleration 1-30,000 rpm/sec.**,selectable per step
  • •  Vacuum On /Off
• •  3 Programmable Dry Contacts: e.g. for automated control of Dispense unit, Nitrogen diffuser, etc.
• •  Structured and password protected recipe storage for easy and safe management
• •  Digitally controlled Motor with digital incremental speed signal feed back
• •  Includes: (1) standard Vacuum Chuck
  • •  A-V36-S45-PP, Ø45 mm for up to Ø 6“ wafers D-V10-S50-PP, Small Fragment Adapter for Ø ½“- Ø 2’’ Pieces and Fragments (Alternative Chucks optionally available)
• •  Drain connection 1” male NPT
  • •  (Exhaust Hose optional)

** Measured without substrate, limitations may apply depending on chuck used and substrate specification.

Details

Liner Set

Liners are available in PET (Polyethylenterephthalat). 0.5mm thick, transparent, antistatic (10⁸ - 10¹⁰ Ω) to prevent possible build-up of static charge in the chamber.

Syringe Holder Starter Kit

Consisting of several 30cc dispense barrels, needles and plungers.

Central Dispensing Syringe Holder

For single or triple syringes, with integrated N2 diffuser.

Performus X Dispense Unit

Can be mounted in syringe holder and be connected to one of the 3 programmable dry contacts.

Foot Switch

For hand free usage; controlling start/stop function and vacuum.

Centering Tool

Corrugated Drainhose and connector

In NPP, including connection to connect to the drainport.

Vacuum Pump

Details

Customized vacuum or mechanical chucks are available for almost any application.

Chucks are available in following materials:

• PP: NPP with EPDM o-ring
• FP: PTFE (TFM 1600 with FKM o-ring)  alternatively for thin substrates: porous PTFE

Note: other materials available on request, please contact us for details.

Fragments

Dies, Wafer, Fragments, etc.

Round Substrates

Vacuum for 2" up to 300mm Wafer.

Low Contact

Round Substrates

Vacuum and Centering pins.

Square Substrates

Mask, Solar Cells, etc.

Round Substrates

Mechanical and Centering pins.

Regular Substrates

Labaratory Glass, etc.

Thin, Fragile, Substrates

Foils, etc.

Details

POLOS Series Single Wafer Spin Processor

Details