The POLOS 200 spin coaters can be manual or optional semi-automatic chemical dispense with clear/transparent flat top lid, with center hole. Seamless full-plastic housing in Natural Polypropylene. For fragments and substrates up to Ø200 (or 8”) or 6" x 6".
Coating, Etching, Cleaning, Drying, Developing
Compatible with advanced option such as:
- backside rinsing
- automatic lid opening
- up to 16 digital I/O and 4 analog I/O
Includes a FREE vacuum chuck
Specifications | |
Available number of programs | Unlimited* |
Steps per program | Unlimited* |
Spin speed* | 1 - 12,000 rpm** ± 1rpm steps |
Spin speed accuracy | ± 0.1 rpm ** |
Spin rotational direction | Clockwise, Counter clockwise Puddle |
Max. acceleration | 30,000 rpm/sec** |
Spin time | |
Programmable outputs | 3 dry relays, nominal switching capacity 0.5A /125 VAC - 0.3A / 60DC |
System data | |
Housing material | Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM) |
Process chamber material | Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM) |
Interface | Detachable, full-size touchscreen, glove-friendly,IP52, chemical resistant |
External connection | 1 USB Port in the controller |
Max. substrate diameter | 260mm round or 6ʺ x 6ʺ square |
Max. process chamber diameter | 302 mm |
Dimension (desktop version) | 380 (w) x 307 (h) x 599 (d) mm |
Shipping weight | 20 kgs |
Shipping dimension | 680 x 580 x 480 mm |
Requirements | |
Voltage | 100 - 120 VAC / 200 - 240 VAC 50/60 Hz (auto select) |
Power consumption | Peak 1800 W |
Max. current | 10A / 8A |
Vacuum | - 80 kPa (-24 inchHg), ≥ 80 lpm Tube OD Ø8mm |
Motor purge gas | 20 - 50 kPa, 2-5 l/min, Tube OD Ø 6mm |
Drain connection | 1” M-NPT |
Customized vacuum or mechanical chucks are available for almost any application.
Chucks are available in following materials:
Note: other materials available on request, please contact us for details.
POLOS spin coaters and spin processors are specially build in Germany for SPS-Europe. Our spinners meet the highest quality standards for the Semiconductor, Biotechnology, and Nanotechnology industries.
CONTACT US:
Phone: +31 341 360 590
.
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