SPIN150i

 
THE SPIN150i SPIN COATER

Our high - quality, all NPP POLOS single wafer spin coaters are specifically designed for R&D and low volume production in the MEMS, Semiconductor, PV, Microfluidics field, etc. Suitable for all typical spin processes: cleaning, rinse/dry, coating, developing and etching.

The low-cost SPIN150i spin coater is suitable for processing fragments as small as 5 mm up to Ø150 (or 6”) or 4" x 4" substrates. Detachable touchpanel. Unlimited Program Storage for recipes with multiple steps each (CW & CCW rotation for puddle spin coating applications.)

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SPIN COATERS SPIN150i-NPP Table Top / SPIN150i-PTFE Table Top
Table Top Model for manual or optionally automated chemical dispense. High quality seamless NPP fabrication. Optional in PTFE. Includes a vacuum chuck and FREE fragment adapter
SPIN COATERS SPIN150i NPP Integrator / SPIN150i PTFE Integrator
Easy in-deck integration in your existing or new wetbench. Available in natural polypropylene (NPP) or optional PTFE process chamber. Includes a vacuum chuck and FREE fragment adapter

Details



 
PRODUCT CONFIGURATOR


NPP
PTFE

Please choose if syringe holder for center dispensing or static barrier plate is required.


Please specify the dispense system if required.


Choose your first topside injector type.


Choose your second topside injector type.

None
Spray (info)
Jet (info)
EBR (info)

Please indicate if an automated chemical delivery system is required.


Please indicate if a second automated chemical delivery system is required

None
Dispense vessel (info)
Peristaltic pump

Please indicate preferred drain option.


Please specify the required drain tube length.

None
1.5 meter (info)
5 meter (info)
1.5 meter PFA (info)

Please indicate if a drain canister is required for waste storage.

None
5 liter (info)

Own Vacuum
Vacuum Pump (oil-less)

Liner Set (info)
Centering Aid (info)
Fragment Adapter
Non-Vacuum Chuck
Foot Switch

Round (wafer)
Square substrate

1" (25mm)
2" (50mm)
3" (75mm)
4" (100mm)
5" (125mm)
6" (150mm)
Other size (please specify you size in the remark field at the end of the configurator)

0 to 4500 EURO
4500 EURO and above

Quoteform

Please fill in the quoteform to send your request.

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