You can see all the spin coater are suitable for Cleaning, Rinse/Dry, Coating, Developing & Etching.
SPIN COATER MODELS |
SUBSTRATE SIZE |
AVAILABLE SPIN COATER MODELS |
MATERIAL |
ETCHING * |
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UP TO Ø 150 mm (or 6") OR 4”x4” |
Spin coater SPIN 150i
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NPP / PTFE | √ | √ | √ | √ | √ | |
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UP TO Ø 200 mm (or 8") OR 6”x6” |
NPP / PTFE | √ | √ | √ | √ | √ | ||
NPP / PTFE |
√ | √ | √ | √ | √ | ||||
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Availablewidths:
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NPP | depends on the integrated spin processor model of your choice | √ |
* Etchant must be competible with NPP. All units are also available in PTFE. Please refer to our chemical compatibility chart.
** Polypropylene enclosure with built-in integrated spin coater depending on your application. Fully automatic for cleaning, high pressure scrub, metal lift-off, stripping, rinsing, spin drying, coating, developing and/or etching of up to Ø 260 mm substrates.
Click here for available chucks for the spincoater.
Teflon® is a Dupont Registered Trademark, TFM is a Dyneon Registered Trademark.
POLOS spin coaters and spin processors are specially build in Germany for SPS-Europe. Our spinners meet the highest quality standards for the Semiconductor, Biotechnology, and Nanotechnology industries. Go to SPS-Europe.
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