Can I spin on glass?
Can I spin on glass?
In the semiconductor industry the sol-gel method is often used to deposit silicon dioxide. This method is known as the Spin-On Glass method (SOG).
Films are normally formed from SOG sols using a spin coating technique. Typically silicon alkoxide (tetraethoxysilane - TEOS or Si(OC2H5)4), water (H2O) , isopropanol ((CH5)2CH(OH)) and hydrochloric acid (HCl). All chemicals are compatible with standard Polypropylene. The substrate must be cleaned first. Our Polos Advanced spin coaters can be equipped with a megasonic cleaning unit, for enhanced spin cleaning method.
