Available number of programs Unlimited*
Steps per program Unlimited*
Spin speed* 0-1,500 rpm** ± 1rpm steps
Spin speed accuracy ± 0.1 rpm **
Spin rotational direction Clockwise, Counter clockwise Puddle
Max. acceleration

≤1500 rpm/s depends on the load**

Spin time  
Programmable outputs

3 dry relays, nominal switching capacity 0.5A /125 VAC - 0.3A / 60DC

System data  
Housing material Natural Polypropylene (NPP)*** or High Chemical Resistant PTFE (TFM)
Process chamber material Natural Polypropylene (NPP)*** or High Chemical Resistant PTFE (TFM)
Interface Detachable, full-size touchscreen, glove-friendly, IP52, chemical resistant
External connection 1 USB Port in the controller
Max. substrate diameter 460 round and 350x350mm square substrates
Max. process chamber diameter 502 mm
Dimension (desktop version) 795 (w) x 638 (h) x 922 (d) mm
Shipping weight 75 kgs
Shipping dimension 800 (w) x 790 (h) x 1180 (d) mm
Voltage 200 - 240 VAC 50/60 Hz
Power consumption Max. 1000 W
Max. current 10A
Vacuum -80 kPa (-24 inchHg), ≥ 80 lpm. Tube OD Ø 8mm
Motor purge gas 20 - 50 kPa, 2-5 l/min, Tube OD Ø 6mm 500lph
Drain connection 1,5” M-NPT

* Considering additional capability of standard unit such as USB backup, recipe cycling, PC software etc.
** Measured without substrate, limitations may apply depending on chuck used and substrate specification.
*** For our spin processors and chucks we use NPP-H with α-crystalline properties.

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