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Welcome Spin Coating
Applications- Spin Drying
- Rinse / Cleaning
- Spin Etching
- Manual Spin Coating
- Automatic Coating
- Spin Developing
- Chemical Compatibili ..
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Applications >> Spin Developing
REQUIRES:
- ACD Automatic Chemical Dispense
- Teflon® (PTFE) Housing
- Exhaust / Drain Combination
- Pressure Vessels
- DI Topside Flood Rinse (special)
OPTIONS:
- Non-Vacuum Chuck (Mechanical)
- Backside Rinse
- Puddle and Dynamic Spray (special)
- Selectable Drain Valve
- Temperature Controlled Chemical Supply (special)
RECOMMENDED MODELS: Automatic Chemical Dispense (ACD):
- Up to 150mm: POLOS ACD200-PTFE-HD
- Up to 200mm: POLOS ACD200-PTFE-HD
- Up to 300mm: POLOS ACD300-PTFE-HD
CHECK CHEMICAL COMPATIBILITY OF YOUR PROCESS WITH THE NPP OR PTFE BOWL-MATERIAL.
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