Applications >> Rinse / Cleaning

REQUIREMENTS:

• Choice of Vacuum or Mechanical Chuck
• Manual (MCD) or Automatic Fluid Dispense (ACD)

OPTIONAL:

• Back-Side Rinse
  (only with mechanical chucks)

RECOMMENDED MODELS:

Manual / Automatic Dispense

• Up to 150mm: SPIN150-NPP* / POLOS ACD200-NPP*
• Up to 200mm: POLOS MCD200-NPP* / ACD200-NPP*
• Up to 300mm: POLOS MCD300-NPP* / ACD300-NPP*

* Teflon® (PTFE) units are available, depending on chemicals.

CHECK CHEMICAL COMPATIBILITY OF YOUR PROCESS WITH THE NPP OR PTFE BOWL-MATERIAL.

PICTURE:

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