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SPS icon red  Applications >> Spin Drying

REQUIREMENTS :

  • Use Low Contact Chuck
    (mechanical chuck: no vacuum required)
    only the edge of the substrate is
    in contact with the chuck

RECOMMENDED MODELS*:

Manual Dispense

* Models are standard supplied with vacuum chuck , mechanical chucks are optionally available, depending on substrate.

CHECK CHEMICAL COMPATIBILITY OF YOUR PROCESS WITH THE NPP OR PTFE BOWL-MATERIAL .

PICTURE:

Category:Description:File:
Dyneon TFM1600 SpecificationsTFM 1600 speqs.pdf

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