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SPS icon red  Spin Processor & Coaters >> ACD200-NPP Spin Coater

FEATURES ACD200-NPP Single Substrate Spin Processor:

  • Automatic Chemical Dispense:
    • dispensing fluids through up to 6 spray nozzles
    • each programmable for sequential or parallel dispense
  • Clear/Transparant Domed Lid with central integrated N2 shower purge
  • Seamless Full-Plastic Housing in Natural Polypropylene (NPP)
  • Table-Top Model: dimensions: 33 (w) x 55 (d) x 32 (h) cm
  • Substrate size: fragments and substrates up to Ø260mm (or 8") or 6"x6"
  • Servo-controlled Motor, assuring repeatable rpm rates
  • Easy, step-by-step Programming via Gloved-Finger-Friendly, Full-Size Keyboard with LED Backlit Display 
  • Programmable Digital Process Controller:
    • Storage of multiple programs of 99 Step Recipes each, for:
      • Speed 1-10.000rpm, Time, Acceleration
      • Vacuum On/Off 
      • Relay Open/Close
      • Multi-User Access Levels
  • 2 Programmable ON/OFF Switching Outputs
    e.g. for Dispense On/Off, Nitrogen On/Off, etc.
  • Drain connection
  • CE-approved

Unit comes standard including 2 integrated spray nozzles and central N2 shower purge. 
Vacuum Chuck A-V36-S45-PP and Small Fragment Adapter D-V10-S50-PP up to Ø150mm, or alternatively, Vacuum Chuck A-V87-S96-PP for larger substrates up to Ø200mm and (1) centering aid (F-Sx/POLOS200) are also included.
       or 
Adapter D-V10-S50-PP,                           A-V87-S96-PP
easily fits on top of A-V36-S45-PP

A wide variety of other chucks, including non-vacuum, are available at request.

The POLOS ACD200 Spin Processors are available in NPP or PTFE, as Table-Top or OEM In-Deck unit.

OPTIONS

  • OEM In-Deck Version (ID)
  • PTFE Housing instead of Natural Polypro
  • Heavy Duty Motor for Puddle Function (HD)
  • Wafer Centering Tool (F-Sx/POLOS200)
  • Drain Exhaust Hose (DEXT)
  • Drain Exhauxt Seperation Port Tee (DET)
  • Vacuum Pump (VP80)
  • Dispense Vessel in PTFE (DV)
  • Adjustable Injector Head (ILACD)
  • Back-Side Rinse (BSR)
  • Edge Bead Removal (EBR)
  • Mini Wet Station (MWS)

TYPICAL APPLICATIONS:  

PICTURE:

DOWNLOADS:

Category:Description:File:
ACD Available Standard Spray NozzlesACD Available standard Spray Nozzles capacity.pdf

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